Transmission Laser Welding of Similar and Dissimilar Semiconductor Materials
نویسندگان
چکیده
Laser micro-welding is an advanced manufacturing method today applied in various domains. However, important physical limitations have prevented so far to demonstrate its applicability silicon (Si) and other technology-essential semiconductors. Concentrating on circumventing the optical limits deliverable energy density at interfaces between narrow-gap materials with intense infrared light, first feasibility demonstration of transmission laser welding Si workpieces using nanosecond pulses made. A shear joining strength 32 ± 10 MPa which compares very favorably complex process alternatives obtained. Supported by experiments repeated different material combinations including gallium arsenide, it confirmed that this remarkable performance level achievable for similar dissimilar The demonstrations rely a small footprint fiber laser, aspect holds great promises advent high-efficiency flexible beneficial technology developments lab-on-a-chip hybrid semiconductor systems.
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ژورنال
عنوان ژورنال: Laser & Photonics Reviews
سال: 2022
ISSN: ['1863-8880', '1863-8899']
DOI: https://doi.org/10.1002/lpor.202200208